Small vacuum plasma device（PR60L ， PR80L）
High precision, fast response, good handling and compatibility, perfect functions and professional technical support.
Small vacuum plasma device（PR60L ， PR80L）
|
Number |
Project |
Technical Parameter |
|
1 |
Specifications of the whole machine |
PR60L：920mm(W) × 960mm(D) × 1720mm（H） PR80L：920mm(W) ×1030mm(D)×1720mm（H） |
|
2 |
Vacuum chamber specifications |
PR60L: Imported aluminum400(W) ×400(H)×400(D)mm PR80L: Imported aluminum450(W) ×400(H)×450(D)mm |
|
3 |
Electrode plate specifications |
PR60L：6 layer flat plate electrode plate （380(W)×310(D)mm） PR80L：8 layer flat plate electrode plate （420(W)×360(D)mm） |
|
4 |
Control system |
Touch screen + PLC control |
|
5 |
Vacuum measurement system |
Pirani resistance vacuum gauge |
|
6 |
Gas metering system |
Precision mass flow control meterMFC |
|
7 |
Number of gas pathways |
2 channels intake, 1 way venting |
|
8 |
Plasma generator |
500W&1KWPlasma generation source，40KHz （selectable13.56MHz） |
|
9 |
Working gases |
2 working gases are optional：Ar2、N2、H2、O2 |
|
Features |
High precision, fast response, good handling and compatibility, perfect functions and professional technical support. |
|
|
Industry |
It is suitable for cameras and industries, mobile phone manufacturing, semiconductor IC fields, silica gel, plastics, polymer fields, automotive electronics industry, aviation industry, etc. |
|
|
Application |
1. Camera and fingerprint recognition industry: Oxidation removal on the surface of the gold PAD of the soft hard bonding board; IR surface cleaning and cleansing; 2. In the field of semiconductor ICs, COB, COG, COF, ACF processes are used for cleaning before wire bonding and soldering; 3. Silicone, plastic, and polymer fields: Surface roughening, etching, and activation of silicone, plastic, and polymer. |
|
Related products
-
MA-(0.8~4MM)×1300MM Steel Coil Slitting Equipment
Contact UsMA-(0.8~4MM)×1300MM Steel Coil Slitting Equipment can process the slitting of the coil with different sizes to small strips for processing various kinds of metal coil materials.
-
-
RO EDI
Contact UsOrisun group is specialize in supplying one stop solutions for whole manufacture chain. developing and manufacturing reverse osmosis water treatment for over 20 years.Our equipment is widely used in pharmacy industry , food and beverage industry , cosmetic industry , chemical industry, etc.As a leading provider of water treatment solutions ,our mission is to supply clean , healthy and safe water for all over the world.
-
VMC 500 CNC Vertical Machining Center
Contact UsThe machine is suitable for communication, medical equipment, power tools, 3C products processing,etc.Three axes acceleration up to 1G, from standstill to 48m/min, just 0.2 seconds.
Reviews
There are no reviews yet.