Medium sized vacuum plasma equipment（PM180L ， PM216L）

Number	Project	Technical parameter
1	Machine specifications	PM180L：1400(W) ×1720(H)×1050(D)mm PM216L：1450(W) ×1720(H)×1150(D)mm
2	Vacuum chamber specifications	PM180L：Imported aluminum 550(W)×680(H)×500(D)mm PM216L：Imported aluminum 600(W)×600(H)×600(D)mm
3	Electrode plate specifications	PM180L：10 layer flat electrode（530(L)×400(W)mm）Can customized PM216L：10 layer flat electrode（560(W)×500(D)mm）Can customized
4	control system	Touch screen + PLC control
5	Vacuum measurement system	Pirani resistance vacuum gauge
6	Gas metering system	Accurate mass flow controllersMFC
7	Number of gas pathways	2-way intake, 1-way exhaust
8	Plasma Generator	5KWPlasma generation source，40KHz（selectable 13.56MHz）
9	working gas	2 working gases are optional：Ar2、N2、H2、O2
Features	High precision, fast response, good handling and compatibility, perfect functions and professional technical support.
Industry	Suitable for camera and industry, mobile phone manufacturing, semiconductor IC field, silicone, plastic, polymer field, automotive electronics industry, aviation industry, etc.
Application	1. Camera and fingerprint recognition industry: deoxidation of the gold PAD surface of rigid-flex boards; IR surface cleaning and cleaning; 2. Semiconductor IC field: COB, COG, COF, ACF process, used for wire bonding, cleaning before soldering; 3. Silicone, plastic, polymer field: silica gel, plastic, polymer surface roughening, etching, activation.

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